TCP-600， TCP-5000
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-015
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-40
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-120
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-121
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-300
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-380
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-310
PFEIFFER / BALZERS TURBO PUMP CONTROLLERS TCP-600

渦輪分子泵具有提供超清潔、無(wú)碳?xì)浠衔锏恼婵窄h(huán)境的能力，故常被用戶選用。然而，用戶也偶爾會(huì)發(fā)現(xiàn)渦輪分子泵提供不了不含碳?xì)浠衔锏恼婵窄h(huán)境。經(jīng)調(diào)查發(fā)現(xiàn)碳?xì)浠衔锏膩?lái)源，50%是操作失誤所帶來(lái)的問(wèn)題，如渦輪分子泵的前級(jí)泵為油封式旋片泵時(shí)，沒(méi)有控制返流的安全閥，不合理的放氣程序都會(huì)引起油蒸汽的返流，不合要求的安全閥也會(huì)引起油污染。